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Semiconductor Industry Application Wf6 Gas Tungsten Hexafluoride

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Semiconductor Industry Application Wf6 Gas Tungsten Hexafluoride

Brand Name : CMC

Model Number : Wf6

Certification : COA

Place of Origin : China

MOQ : 1 Piece

Price : US $ 15/PC

Payment Terms : L/C, T/T

Supply Ability : 200t/Year

Delivery Time : 15 days

Packaging Details : Cylinder/Tank

Product Name : Tungsten Hexafluoride

Appearance : Colorless

Purity : 99.999%

Transport : by Sea

Model No. : Tungsten Hexafluoride

Transport Package : Sea Transportation

Specification : 10L 40L 50L

Trademark : CMC

Origin : China

HS Code : 2812190091

CAS No. : 7783-82-6

Formula : Wf6

EINECS : 232-029-1

Constituent : Industrial Pure Air

Grade Standard : Electronic Grade

Chemical Property : Poisonous Gases

Customization : Available | Customized Request

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Product Description

Tungsten hexafluoride (WF6) is a chemical compound composed of tungsten and fluorine atoms. It is a colorless gas at room temperature and is primarily used in the semiconductor industry for the chemical vapor deposition (CVD) process to deposit thin films of tungsten.

Here are a few key points about tungsten hexafluoride gas:

Chemical Formula: WF6
Physical Properties: Tungsten hexafluoride is a dense gas with a density of 13.1 g/cm³. It has a boiling point of 17.1 °C (62.8 °F) and can exist as a gas at room temperature and atmospheric pressure.
Reactivity: WF6 is highly reactive and can readily react with water vapor in the air to form tungsten oxide and hydrofluoric acid. It is also corrosive to many materials, including metals, glass, and ceramics.
Uses: The main application of tungsten hexafluoride is in the semiconductor industry. It is used as a precursor for depositing thin films of tungsten in the fabrication of microelectronic devices. WF6 is also used in the production of tungsten metal and as a reagent in various chemical reactions.
Safety Considerations: Tungsten hexafluoride is a toxic and corrosive substance. It can cause severe burns and eye damage upon contact. Inhalation of the gas can result in respiratory irritation and other health hazards. Proper safety precautions, such as handling it in a well-ventilated area and using appropriate personal protective equipment, are essential when working with WF6.

Basic Info.

Model NO.	WF6	Transport Package	Cylinder
Specification	10L/15kg	Trademark	CMC
Origin	Suzhou, China	HS Code	2812190091
Production Capacity	200t/Year

Product Spec:

ungsten Hexafluoride WF6 GAS
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade

The COA of Product:

Test items	Units	Quality requirements	Test results
CF4	ppm	<0.5	<0.01
O2	ppm	<0.5	<0.01
N2	ppm	<1	0.03
CO	ppm	<0.5	<0.02
CO2	ppm	<0.5	<0.01
SiF4	ppm	<0.5	<0.1
SF6	ppm	<0.5	<0.1
HF	ppm	<5	0.19
Al	ppb	≤10	<0.020
As	ppb	≤10	<0.001
B	ppb	≤10	<0.005
Ca	ppb	≤5	<0.200
Cd	ppb	≤2	<0.001
Cr	ppb	≤10	<0.020
Fe	ppb	≤10	<0.007
K	ppb	≤5	<0.100
Mn	ppb	≤10	<0.001
Na	ppb	≤5	<0.040
Th	ppb	≤0.1	<0.001
Ti	ppb	≤10	<0.002
Li	ppb	≤10	<0.002
U	ppb	≤0.05	<0.001
Zn	ppb	≤10	<0.005
Si	ppb	≤10	<0.100
Pb	ppb	≤10	<0.001
P	ppb	≤2	<0.300
Mg	ppb	≤10	<0.020
Ni	ppb	≤20	<0.030
Cu	ppb	≤5	<0.005
Mo	ppb	≤10	<0.001
Total impurities of other metal	ppb	≤500	<0.0010

Semiconductor Industry Application Wf6 Gas Tungsten Hexafluoride

Shanghai Kemike Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.

Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.
Semiconductor Industry Application Wf6 Gas Tungsten Hexafluoride

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